Oxford Instruments ships impressive five module cluster tool for growing PV market

Leading system manufacturer Oxford Instruments Plasma Technology has recently shipped a five module cluster system to Robert Bosch, one of the world’s leading manufacturers of solar cells. The System100Pro deposition tool is a ‘Hex Handler’ providing capabilities for several deposition technologies, and allowing multiple process steps to be carried out without a vacuum break.

Oxford Instruments’ cluster systems offer high vacuum options for the handler and process modules, resulting in reduced background contamination levels, and the ability to cluster different deposition technologies. The system delivered to Bosch also incorporates a high temperature substrate table option up to 700ºC, and flexibility of power ramping within the software, and low power plasma strike options, thus minimising potential damage at the start of process. Some of the technology was developed under the EC supported contract FP7-Energy-2009-1 - 241281 'ThinSi'.

Mark Vosloo, Sales and Customer Support Director, Oxford Instruments Plasma Technology comments, “This five module tool for such a prestigious customer has allowed us to successfully integrate multiple technologies into the cluster, such as the ability to run both ALD and plasma CVD aluminium oxide depositions. With the increasing trend towards generating energy by renewable means, we are establishing ourselves as a key supplier to the growing PV R&D market.”

Based in Stuttgart, Germany, Bosch develops, manufactures, and markets wafer-based and thin film silicon solar cells that are characterised by high, stable output with narrow output tolerance. The company has purchased the Oxford Instruments cluster tool for use in research and development.