A new issue of this journal has just been published. To see abstracts of the papers it contains (with links through to the full papers) click here:
Selected papers from the latest issue:A Wireless And Passive Wafer Cleanliness Monitoring Unit Via Electromagnetic Coupling For Semicondutcor/Mems Manufacturing Facilities
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Xu, Zhang , Junseok, Chae
This paper presents a wireless and passive chemical sensing system, in-situ real time, via electromagnetic (EM) coupling, capable of monitoring wafer cleanliness during rinsing process at semiconductor/MEMS manufacturing facilities. A MEMS chemical sensor is embedded in a wafer-form transponder to evaluate the rinsing process in-situ by measuring the conductivity of rinsing water inside micro-features formed by two interdigitated electrodes. All necessary power for the transponder is supplied from an external interrogator via the on-wafer transponder antenna. The modulated conductivity data is then emitted back from the transponder to the external interrogator in wireless and battery-free manner. The wireless system has...
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Xu, Zhang , Junseok, Chae
This paper presents a wireless and passive chemical sensing system, in-situ real time, via electromagnetic (EM) coupling, capable of monitoring wafer cleanliness during rinsing process at semiconductor/MEMS manufacturing facilities. A MEMS chemical sensor is embedded in a wafer-form transponder to evaluate the rinsing process in-situ by measuring the conductivity of rinsing water inside micro-features formed by two interdigitated electrodes. All necessary power for the transponder is supplied from an external interrogator via the on-wafer transponder antenna. The modulated conductivity data is then emitted back from the transponder to the external interrogator in wireless and battery-free manner. The wireless system has...
A novel humid electronic nose combined with an electronic tongue for assessing deterioration of wine
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Luis, Gil-Sánchez , Juan, Soto , Ramón, Martínez-Máñez , Eduardo, Garcia-Breijo , Javier, Ibáñez , ...
We report herein the use of a combined system for the analysis of the spoilage of wine when in contact with air. The system consists of a potentiometric electronic tongue and a humid electronic nose. The potentiometric electronic tongue was built with thick-film serigraphic techniques using commercially available resistances and conductors for hybrid electronic circuits; i.e. Ag, Au, Cu, Ru, AgCl, and C. The humid electronic nose was designed in order to detect vapours that emanate from the wine and are apprehended by a moist environment. The humid nose was constructed using a piece of thin cloth sewn, damped with...
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Luis, Gil-Sánchez , Juan, Soto , Ramón, Martínez-Máñez , Eduardo, Garcia-Breijo , Javier, Ibáñez , ...
We report herein the use of a combined system for the analysis of the spoilage of wine when in contact with air. The system consists of a potentiometric electronic tongue and a humid electronic nose. The potentiometric electronic tongue was built with thick-film serigraphic techniques using commercially available resistances and conductors for hybrid electronic circuits; i.e. Ag, Au, Cu, Ru, AgCl, and C. The humid electronic nose was designed in order to detect vapours that emanate from the wine and are apprehended by a moist environment. The humid nose was constructed using a piece of thin cloth sewn, damped with...
Development of an AC Electrokinetics-Based Immunoassay System for On-site Serodiagnosis of Infectious Diseases
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Xiaozhu, Liu , Kai, Yang , Ashutosh, Wadhwa , Shigetoshi, Eda , Shanshan, Li , ...
This paper presents a lab-chip immunoassay system that is based on AC electrothermal effect. It uses a poly (dimethylsiloxane) based microfluidic cartridge as the disposable immunoreactor, on which key processes such as reagent delivery, incubation and washing are performed using low voltage AC signals. A low cost, reconfigurable detection module is constructed based on light emitting diode induced fluorescence. Along with the employed AC electrothermal effect, the developed diagnostic system has demonstrated a much shorter incubation time than conventional pressure driven flow system. A tenfold acceleration in detection is achieved while safely differentiating between the positive and negative primary antibodies...
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Xiaozhu, Liu , Kai, Yang , Ashutosh, Wadhwa , Shigetoshi, Eda , Shanshan, Li , ...
This paper presents a lab-chip immunoassay system that is based on AC electrothermal effect. It uses a poly (dimethylsiloxane) based microfluidic cartridge as the disposable immunoreactor, on which key processes such as reagent delivery, incubation and washing are performed using low voltage AC signals. A low cost, reconfigurable detection module is constructed based on light emitting diode induced fluorescence. Along with the employed AC electrothermal effect, the developed diagnostic system has demonstrated a much shorter incubation time than conventional pressure driven flow system. A tenfold acceleration in detection is achieved while safely differentiating between the positive and negative primary antibodies...
Arrays of large-area, tip/tilt micromirrors for use in a high-contrast projector
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Reynald, Hoskinson , Stefan, Hampl , Boris, Stoeber
Arrays of two-degree of freedom analog micromirrors are designed for use within an high-contrast projector and fabricated using a multi-user MEMS fabrication process. We demonstrate a novel way of optimizing the tradeoffs between tilt angle and mirror size by subdividing the mirrors into smaller functional subsections that move synchronously. The mirror design employs multiple mirrors within a gimbal frame. The frame rotates around one axis, and each mirror within the frame rotates around a perpendicular axis, resulting in two-degree of freedom rotation. The design employs specific electrode shapes to allow one-layer connections. Using these fabricated mirrors, simultaneous actuation of mirrors...
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Reynald, Hoskinson , Stefan, Hampl , Boris, Stoeber
Arrays of two-degree of freedom analog micromirrors are designed for use within an high-contrast projector and fabricated using a multi-user MEMS fabrication process. We demonstrate a novel way of optimizing the tradeoffs between tilt angle and mirror size by subdividing the mirrors into smaller functional subsections that move synchronously. The mirror design employs multiple mirrors within a gimbal frame. The frame rotates around one axis, and each mirror within the frame rotates around a perpendicular axis, resulting in two-degree of freedom rotation. The design employs specific electrode shapes to allow one-layer connections. Using these fabricated mirrors, simultaneous actuation of mirrors...
Vibration Sensitivity Analysis of MEMS Vibratory Ring Gyroscopes
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Sang Won, Yoon , Sangwoo, Lee , Khalil, Najafi
This paper presents a detailed model for possible vibration effects on MEMS degenerate gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be relatively vibration-insensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. Our model incorporates four vibration modes needed to describe vibration-induced errors: two flexural modes (for gyro operation) and two translation modes (excited by external vibration). The four-mode dynamical model for ring gyroscopes is derived using Lagrange's equations. The model considers all elements comprising a ring gyroscope, namely the ring structure, the support-spring structures, and the electrodes...
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Sang Won, Yoon , Sangwoo, Lee , Khalil, Najafi
This paper presents a detailed model for possible vibration effects on MEMS degenerate gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be relatively vibration-insensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. Our model incorporates four vibration modes needed to describe vibration-induced errors: two flexural modes (for gyro operation) and two translation modes (excited by external vibration). The four-mode dynamical model for ring gyroscopes is derived using Lagrange's equations. The model considers all elements comprising a ring gyroscope, namely the ring structure, the support-spring structures, and the electrodes...
Microcantilever sensors with embedded piezoresistive transistor read-out: design and characterization
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Pushpapraj, Singh , Jianmin, Miao , Shao, Lichun , Rama Krishna, Kotlanka , Woo-Tae, Park , ...
Microcantilevers are very effective tools in detecting of small amount of bio-species and chemicals. Recent advances in metal-oxide-semiconductor field effect transistor (MOSFET) as a transducer to detect the molecule binding-induced cantilever deflection has gained extensive attention due to its high sensitivity and direct compatibility with micro-electro-mechanical system (MEMS) sensors. In this paper, six different piezoresistive nMOSFET-embedded microcantilevers are designed and characterized to systematically study the impacts of different cantilever and transistor channel geometries on the device sensitivity. It is found that the amount of change in the drain current is the same range as reported in the literature. For point-loading...
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Pushpapraj, Singh , Jianmin, Miao , Shao, Lichun , Rama Krishna, Kotlanka , Woo-Tae, Park , ...
Microcantilevers are very effective tools in detecting of small amount of bio-species and chemicals. Recent advances in metal-oxide-semiconductor field effect transistor (MOSFET) as a transducer to detect the molecule binding-induced cantilever deflection has gained extensive attention due to its high sensitivity and direct compatibility with micro-electro-mechanical system (MEMS) sensors. In this paper, six different piezoresistive nMOSFET-embedded microcantilevers are designed and characterized to systematically study the impacts of different cantilever and transistor channel geometries on the device sensitivity. It is found that the amount of change in the drain current is the same range as reported in the literature. For point-loading...
Analysis of the environmental magnetic noise rejection by using two simple magnetoelectric sensors
22 August 2011, 20:51:37
Publication year: 2011
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Y., Shen , J., Gao , L., Shen , D., Gray , J., Li , ...
We have evaluated the performance of a classical differential technique to reject magnetic or, in a lesser extent, the vibrational coherent noise sources sensed by two identical magnetoelectric (ME) laminated sensors with the help of a data logger. The signals of two ME sensors were directly subtracted given highly homogeneous external noise. Through a signal processing technique, the intrinsic noise of the ME sensor systems was obtained to be 20 pT/√Hz with a rejection factor of the external homogeneous noise sources of 20. The latter is mainly limited, as theoretical described, by the incoherent noise and discrepancy between the sensors....
Source: Sensors and Actuators A: Physical, In Press, Accepted Manuscript, Available online 22 August 2011
Y., Shen , J., Gao , L., Shen , D., Gray , J., Li , ...
We have evaluated the performance of a classical differential technique to reject magnetic or, in a lesser extent, the vibrational coherent noise sources sensed by two identical magnetoelectric (ME) laminated sensors with the help of a data logger. The signals of two ME sensors were directly subtracted given highly homogeneous external noise. Through a signal processing technique, the intrinsic noise of the ME sensor systems was obtained to be 20 pT/√Hz with a rejection factor of the external homogeneous noise sources of 20. The latter is mainly limited, as theoretical described, by the incoherent noise and discrepancy between the sensors....
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