Lancaster University based in the UK is populating part of its new
world-class Lancaster Quantum Technology Centre (LQTC) with Oxford Instruments’
plasma systems as part of its strategy for the development of physical
sciences.
The versatile and proven Oxford Instruments Plasma Technology PlasmaPro
NGP80 and PlasmaPro System100 ICP Etch systems were chosen for their flexibility
and suitability to enable the many applications that the multi-user LQTC wishes
to run in its cleanrooms. With an extensive process library of over 6,000
recipes and its excellent customer support, service and training packages,
Oxford Instruments’ systems were the ideal choice for the LQTC.
Head of the Semiconductor Physics
& Nanostructures Research Group at Lancaster University, Professor Tony
Krier, comments, “These new Oxford Instruments etch tools will enable us to run
dry plasma etching and nano-patterning on a range of semiconductors including
narrow gap antimonides and dilute nitrides for mid-infrared light sources and
detectors. They will also be used for development of novel solar cells, quantum
dot memories, nano-electronic structures, and much more.
Prof Krier continued, “The new
clean room facility provides a focus for industrial and academic researchers
with interests in fabricating nanoscale structures to enable them to
investigate quantum phenomena. We chose Oxford Instruments because of the
excellent technical specification and well founded reputation of the processing
tools backed up by expert specialist support.”
“Oxford Instruments was founded as a result of the pull-through of
science into the marketplace, and we are delighted to be part of this
significant development in UK scientific research capabilities”, says Mark
Vosloo, Sales & Customer Support Director at Oxford Instruments Plasma
Technology, “Like the LQTC, Oxford Instruments uses innovation to turn smart science
into world class products, meeting the needs of the 21st century and beyond.”
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