JEOL launches a new series of Field Emission Scanning Electron
Microscopes (FE-SEM) that offer expanded imaging and analysis capabilities
customizable to performance requirements.
The JEOL JSM-7100F series offers sub-1 nm
imaging capabilities and analytical characterization at the sub-100nm scale,
accomplished through the combination of large beam currents with a small probe
size at any accelerating voltage.
Designed for the budget-conscious lab, the JSM-7100F model
is a highly versatile, easy-to-use analytical field emission SEM that offers a
new level of expanded performance. Through the unique 'in-lens field emission
gun', the SEM delivers ≥ 200 nA of beam current to the sample. An aperture
angle control lens (ACL) automatically optimizes both small probe current spot
size for high resolution imaging and spot shape for high beam current, high
resolution microanalysis, while a beam deceleration mode curtails charging on
nonconductive specimens such as ceramics, semiconductors and polymers.
For advanced high resolution capabilities, the JSM-7100FT
model features a newly redesigned hybrid lens and through-the lens detectors
with energy filter. The superior electron optics design of this SEM column
enables high resolution imaging of nanostructures and specimen surface details
for any material type, including magnetic samples. With the integration of in-the-lens
acceleration and deceleration of the electron beam, low kV aberrations are
reduced, yielding higher resolution at the lowest accelerating voltages.
Additionally, JEOL's proven beam deceleration mode (GB Mode) decreases charging
while imaging non-conductive specimens, improves spot size at low kV, and
enhances surface topography.
This new series of Field Emission SEMs offers increased
versatility for multiple analytical techniques and imaging and analysis of
non-conductive samples. Each microscope model features a turbo molecular pump
(TMP) and a rapid specimen exchange airlock to assure a clean vacuum
environment is always maintained.
Optional Low Vacuum
Operation
The optional LV function (up to 300 Pa) offers additional
versatility to both JSM-7100F and JSM-7100FT. The LV function is fully
controlled through the microscope user interface and allows all LV orifices to
be retracted without breaking vacuum for unrestricted low magnification imaging
and maximum beam current (200 nA) in high vacuum. The LV system is equipped
with a solid-state BSE detector.
Adaptable for
Multiple Analytical Techniques
The JSM-7100F series is equipped with a large specimen
chamber that accommodates a wide variety of detectors and accessories
simultaneously and without compromising the performance of one another,
including: multiple EDS, WDS, STEM, BSE, CL and IR camera. The system can also
be equipped with a variety of sub stages including tensile, heating and cooling
stages for in situ experimentation.
Enhanced Productivity
JEOL is renowned for its easy to use SEM operating software,
graphical user interface, and productivity-enhancing functions. Stored images
retain operating conditions and stage coordinates serving effectively as
individual recipe functions, which is ideal in the multi-user
environment. All image archiving, searching, measurement, report
generation, filtering, and montaging can be conducted from the image database.
About JEOL USA, Inc.
JEOL
is a world leader in electron optical equipment and instrumentation for
high-end scientific and industrial research and development. Core product
groups include electron microscopes (SEMs and TEMs), instruments for the
semiconductor industry (electron beam lithography and a series of defect review
and inspection tools), and analytical instruments including mass spectrometers,
NMRs and ESRs.
JEOL
USA, Inc., a wholly owned subsidiary of JEOL, Ltd., Japan ,
was incorporated in the United States
in 1962. The company has 13 regional
service centers that offer unlimited emergency service and support in the U.S.
For
more information about JEOL USA, Inc. or any JEOL products, visit www.jeolusa.com, or call 978-535-5900.
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