Oxford Instruments Plasma
Technology a major supplier of plasma processing equipment, presents an
evolution in single wafer etch technology, the PlasmaPro100 Sapphire.
Designed to enable the Solid State Lighting revolution, Oxford Instruments has
applied its extensive experience of etching all HBLED materials to this new
system that minimises cost of ownership and maximises yield.
The PlasmaPro100 Sapphire
single wafer etch system offers smart solutions to produce the etch results
required to maintain the manufacturers’ competitive edge in this rapidly
expanding market sector.
Comments Michelle Bourke,
Production Business Group Director at Oxford Instruments, “The PlasmaPro100
Sapphire is designed specifically to address the harsh chemistries required
for HBLED materials, delivering fast etch rates uniformly on wafers up to 200mm
in diameter. At Oxford Instruments we strive to provide the most innovative,
cost effective and reliable process solutions for our customers. This latest
system is designed to encompass all these requirements.”
Key system features and benefits
include: Electrostatic Clamp technology capable of clamping Sapphire, GaN on
Sapphire and Silicon; a high power ICP source producing a high density plasma;
magnetic spacer for enhanced ion control; and a high conductance pumping system
delivering maximum gas throughput at low pressures. Above all it has been
developed with reliability, uptime and ease of serviceability in mind.
Solid-state lighting has the
potential to revolutionise the lighting industry. LEDs traditionally used in
displays are evolving to provide illumination for domestic use as governments
legislate globally to make consumers switch to energy-efficient LEDs. As a
company, Oxford Instrument’s remit is to meet customers’ needs through advanced
technology, using innovation to turn smart science into world class products.
This latest product innovation, the PlasmaPro100 Sapphire’s
technology promises manufacturers the tools to deliver more efficient, lower
cost lighting that is needed worldwide to assist this lighting revolution.
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